The 82nd JSAP Autumn Meeting 2021

Makoto Sekine

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Chairperson, etc.

Sat. Sep 11, 2021 1:30 PM - 4:55 PM S301 (Oral)

  • Symposium (Oral)
  • | Symposium
  • | Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

[11p-S301-1~7] Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

Makoto Sekine(Nagoya Univ.), Jaeho Kim(AIST)