Session information

Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[10a-S301-1~10] 8.1 Plasma production and diagnostics

Fri. Sep 10, 2021 9:00 AM - 11:30 AM S301 (Oral)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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9:00 AM - 9:15 AM

[10a-S301-1] Time and spatial resolved laser Thomson scattering measurement in hydrogen plasmas induced by laser produced Sn plasma radiation

〇Kouichiro Kouge¹, Kentaro Tomita^2,3, Junya Hotta², Yiming Pan², Hiroaki Tomuro¹, Masayuki Morita¹, Tatsuya Yanagida¹, Kiichiro Uchino², Naoji Yamamoto² (1.Gigaphoton Inc., 2.Kyushu Univ., 3.Hokkaido Univ.)

9:15 AM - 9:30 AM

△ [10a-S301-2] Electron temperature, density, and energy distribution function diagnostics of the argon low pressure argon plasma generated by an etching unit based on optical emission spectroscopic measurement

〇Yuya Yamashita¹, Takuya Akiba¹, Toshihide Iwanaga¹, Shuichi Date¹, Yamaoka Hidehiko¹, Hiroshi Akatsuka² (1.TIRI, 2.Tokyo Tech)

9:30 AM - 9:45 AM

[10a-S301-3] Measurement of Electron Temperature and Electron Density by Emission Spectroscopy in Ar&N₂ Mixed Atmospheric Pressure Non-Equilibrium Plasma

〇(M2)Ryo Ishizuka¹, Atsushi Nezu^2,3, Hiroshi Akatsuka^3,1 (1.Tokyo Tech, 2.Open Facility Center, Tokyo Tech, 3.IIR, Tokyo Tech)

9:45 AM - 10:00 AM

△ [10a-S301-4] [Highlight]Highly Sensitive Electric Field Measurement via CARS in Atmospheric Pressure Hydrogen

〇(M2)Takeru Koike¹, Muneoka Hitoshi¹, Terashima Kazuo¹, Ito Tsuyohito¹ (1.The Univ. of Tokyo)

10:00 AM - 10:15 AM

△ [10a-S301-5] Monitoring of Probe Surface in Plasmas Using Impedance Spectroscopy

〇(M1)Junki Morozumi¹, Tomohiro Kuyama^1,2, Seiya Kito¹, Keiichiro Urabe¹, Koji Eriguchi¹ (1.Kyoto Univ., 2.JSPS Research Fellow)

10:15 AM - 10:30 AM

△ [10a-S301-6] Nitrogen Atom Density Measurements in Spiral Shape Nitrogen Plasma

〇(M2)Ryosuke Nishio¹, Shin Kajita², Noriyasu Ohno¹, Hirohiko Tanaka¹, Koji Asaoka¹, Takayoshi Tsutsumi³, Masaru Hori³ (1.Grad. Sch. Eng., Nagoya Univ., 2.IMaSS, Nagoya Univ., 3.cLPS, Nagoya Univ.)

10:30 AM - 10:45 AM

△ [10a-S301-7] Development and basic performance measurement of atmospheric shower head type multi-gas plasma source

〇Tsuyoshi Noguchi¹, Kenichi Yamazaki^1,2, Yuma Suenaga¹, Akitoshi Okino¹ (1.Tokyo Tech., 2.Toshiba Infrastructure Systems & Solutions Corp.)

10:45 AM - 11:00 AM

[10a-S301-8] Measurements of vibrational temperature of molecular nitrogen and density of atomic nitrogen in atmospheric-pressure dielectric barrier discharge nitrogen plasma jet

〇Atsufumi Miyake¹, Naoki Shirai¹, Koichi Sasaki¹ (1.Hokkaido Univ.)

11:00 AM - 11:15 AM

[10a-S301-9] Mechanism of OH radicals induced by atmospheric pressure DC glow discharge using crossed gas flow

〇Naoki Shirai¹, Hiroki Owada¹, Koichi Sasaki¹ (1.Hokkaido Univ.)

11:15 AM - 11:30 AM

[10a-S301-10] Pressure Dependence of Atomic Oxygen Density and Lifetime in Sub-atmospheric Pressure Oxygen Discharge

〇Yusuke Nakagawa¹, Yuta Iwata¹, Fumiyoshi Tochikubo¹ (1.Tokyo Metro. Univ.)

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