Tsuyoshi Noguchi

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 9:00 AM - 11:30 AM S301 (Oral)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[10a-S301-1~10] 8.1 Plasma production and diagnostics

10:30 AM - 10:45 AM

△ [10a-S301-7] Development and basic performance measurement of atmospheric shower head type multi-gas plasma source

〇Tsuyoshi Noguchi¹, Kenichi Yamazaki^1,2, Yuma Suenaga¹, Akitoshi Okino¹ (1.Tokyo Tech., 2.Toshiba Infrastructure Systems & Solutions Corp.)