The 82nd JSAP Autumn Meeting 2021

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Oral presentation

CS Code-sharing session » 【CS.10】 Code-sharing Session of 6.5 & 7.6

[10a-N204-1~12] CS.10 Code-sharing Session of 6.5 & 7.6

Fri. Sep 10, 2021 9:00 AM - 12:15 PM N204 (Oral)

Masahito Tagawa(Kobe Univ.), Akitaka Yoshigoe(JAEA)

11:15 AM - 11:30 AM

[10a-N204-9] Effect of O2 and SR ON-OFF on band bending at SiO2/Si(001) interfaces

〇(P)Yasutaka Tsuda1, Shuichi Ogawa2, Akitaka Yoshigoe1, Tetsuya Sakamoto1, Yuji Takakuwa3 (1.JAEA, 2.SRIS, Tohoku Univ., 3.mSIC, Tohoku Univ.)

Keywords:semiconductor, oxidation, Silicon