[10a-N302-1~6] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

△ [10a-N302-4] A Single Au Proof Mass 3-Axis MEMS Accelerometer with 3D Capacitive Detection Electrode

〇Akira Onishi¹, Akihiro Uchiyama¹, Kohei Shibata¹, Takashi Ichikawa¹, Sangyeop Lee¹, Shin-ichi Iida², Noboru Ishihara¹, Katsuyuki Machida¹, Kazuya Masu¹, Hiroyuki Ito¹ (1.Tokyo Tech., 2.NTT-AT)

Keywords:MEMS, accelerometer, single Au proof mass

This paper describes a novel capacitive-detection electrode for a single Au proof mass three-axis MEMS (microelectromechanical systems) accelerometer. We propose a 3-D capacitive-detection electrode (3-DCE) for a high and uniform sensitivity to sense micro-G (G=9.8m/s²) level. Based on the analysis in terms of the sensitivity and the Brownian noise B_N, we design and fabricate the device with 3-DCE by the multi-metal layer technology for a post-CMOS process. The experimental results show that the obtained B_N is 160 nG/√Hz and the sensitivities of X-, Y-, and Z-axis are 162, 210, and 341 fF /G, respectively.