Research on Capacitive Micro-Displacement Sensors

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Sep 10, 2021 10:30 AM - 12:00 PM N302 (Oral)

Tatsuya Okada(Univ. of the Ryukyus)

11:45 AM - 12:00 PM

〇Hiromu Igarashi¹, Fuminobu Imaizumi¹ (1.Onct)

Keywords:Sensor