10:30 AM - 10:45 AM
〇Kazuya Fujita1, Kosuke Suzuki1, Chun-Yi Chen1, Tso-Fu Mark Chang1, Hiroyuki Ito1, Daisuke Yamane2, Katsuyuki Machida1, Kazuya Masu1, Masato Sone1 (1.Tokyo Inst., 2.Ritsumeikan Univ.)
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Fri. Sep 10, 2021 10:30 AM - 12:00 PM N302 (Oral)
Tatsuya Okada(Univ. of the Ryukyus)
△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above
10:30 AM - 10:45 AM
〇Kazuya Fujita1, Kosuke Suzuki1, Chun-Yi Chen1, Tso-Fu Mark Chang1, Hiroyuki Ito1, Daisuke Yamane2, Katsuyuki Machida1, Kazuya Masu1, Masato Sone1 (1.Tokyo Inst., 2.Ritsumeikan Univ.)
10:45 AM - 11:00 AM
〇Hiroki Kawakami1, Yuki Ito1, Yu-An Chien1, Wan-Ting Chiu1, Parthojit Chakraborty1, Chun-Yi Chen1, Tso-Fu Mark Chang1, Takamichi Nakamoto1, Masato Sone1 (1.Tokyo Inst.)
11:00 AM - 11:15 AM
〇(M2)Masaki Mitsumoto1, Wan-Ting Chiu1, Chun-Yi Chen1, Tso-Fu Mark Chang1, Arisa Jinno2, Hiromichi Kurosu2, Yasushi Watanabe3, Masato Sone1 (1.Tokyo Tech, 2.Nara Women's Univ., 3.Showa Denko Materials)
11:15 AM - 11:30 AM
〇Akira Onishi1, Akihiro Uchiyama1, Kohei Shibata1, Takashi Ichikawa1, Sangyeop Lee1, Shin-ichi Iida2, Noboru Ishihara1, Katsuyuki Machida1, Kazuya Masu1, Hiroyuki Ito1 (1.Tokyo Tech., 2.NTT-AT)
11:30 AM - 11:45 AM
〇(M2)POWEI CHENG1, Yi Chun Chen1, Taku Ichibayashi1,2, Tso-Fu Mark Chang1, Masato Sone1, Suzushi Nishimura1 (1.Tokyo Tech, 2.ENEOS Corp.)
11:45 AM - 12:00 PM
〇Hiromu Igarashi1, Fuminobu Imaizumi1 (1.Onct)
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