The 82nd JSAP Autumn Meeting 2021

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[10a-N401-1~9] 7.2 Applications and technologies of electron beams

Fri. Sep 10, 2021 9:00 AM - 11:30 AM N401 (Oral)

Takafumi Ishida(Nagoya University), Aso Kohei(北陸先端大)

10:00 AM - 10:15 AM

[10a-N401-5] Selected Area Crystallization in Amorphous Film by Electron Beam Irradiation

〇(M1)Shunsuke Tanahashi1, Sae Ohkawara1, Tokunaga Tomoharu1, Yamamoto Takahisa1 (1.Nagoya Univ.)

Keywords:Atomic Layer Deposition, electron beam