[10a-N406-1~10] 9.4 熱電変換

▲ [10a-N406-2] Effect of substrate temperature on thermoelectric performance of CdO thin films

〇(PC)Karuppiah DevaArunKumar¹、Paolo Mele¹、Saurabh Singh²、Tsunehiro Takeuchi²、Devarajan Alagarasan³、Pan Sian Wei⁴、Yukihiro Kawamura⁴、Chihiro Sekine⁴、Sekar Sathish Kumar⁵、Santiyagu Valanarasu⁵ (1.Shibaura Institute of Technology, Saitama, Japan、2.Toyota Technological Institute, Nagoya, Japan、3.Department of Physics, Indian Institute of Science, Bengaluru, 560012, India、4.Muroran Institute of Technology, Muroran, Japan、5.Department of Physics, Arul Anandar College, Karumathur, Tamil Nadu 625 514, India)

キーワード：Thin films, Cadmium Oxide, Seebeck coefficient

In the present work, we studied the effect of substrate temperature on TE properties of cadmium oxide (CdO) thin films.Nanostructured CdO films with granular morphology were prepared via chemical spray pyrolysis technique with different substrate temperatures from 200 ^oC to 400 ^oC. The prepared films have pollycrystalliune nature with cubic crystal structure.According to the room temperature Hall measurement, the electrical resistivity is decreased with increasing deposition temperature. The temperature dependent Seebeck coefficient (S) value increases and the largest value is reached by the film deposited at 300 ^oC with S = -75 microW/K.The maximum calculated power factor (PF) is 1.2 (mW/mK2) for the film deposited at 300 ^oC. The PF, quite large for an oxide thin films, suggests that spray deposited CdO film can be used to fabricate good oxide materials based thermoelectric devices.