2021年第82回応用物理学会秋季学術講演会

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9 応用物性 » 9.4 熱電変換

[10a-N406-1~10] 9.4 熱電変換

2021年9月10日(金) 09:15 〜 12:00 N406 (口頭)

竹内 恒博(豊田工大)、中村 芳明(阪大)

09:30 〜 09:45

[10a-N406-2] Effect of substrate temperature on thermoelectric performance of CdO thin films

〇(PC)Karuppiah DevaArunKumar1、Paolo Mele1、Saurabh Singh2、Tsunehiro Takeuchi2、Devarajan Alagarasan3、Pan Sian Wei4、Yukihiro Kawamura4、Chihiro Sekine4、Sekar Sathish Kumar5、Santiyagu Valanarasu5 (1.Shibaura Institute of Technology, Saitama, Japan、2.Toyota Technological Institute, Nagoya, Japan、3.Department of Physics, Indian Institute of Science, Bengaluru, 560012, India、4.Muroran Institute of Technology, Muroran, Japan、5.Department of Physics, Arul Anandar College, Karumathur, Tamil Nadu 625 514, India)

キーワード:Thin films, Cadmium Oxide, Seebeck coefficient

In the present work, we studied the effect of substrate temperature on TE properties of cadmium oxide (CdO) thin films.Nanostructured CdO films with granular morphology were prepared via chemical spray pyrolysis technique with different substrate temperatures from 200 oC to 400 oC. The prepared films have pollycrystalliune nature with cubic crystal structure.According to the room temperature Hall measurement, the electrical resistivity is decreased with increasing deposition temperature. The temperature dependent Seebeck coefficient (S) value increases and the largest value is reached by the film deposited at 300 oC with S = -75 microW/K.The maximum calculated power factor (PF) is 1.2 (mW/mK2) for the film deposited at 300 oC. The PF, quite large for an oxide thin films, suggests that spray deposited CdO film can be used to fabricate good oxide materials based thermoelectric devices.