3:15 PM - 3:30 PM
[10p-N102-7] Fabrication of AlN/AlGaN HEMTs with n+-GaN regrowth ohmic contacts by sputtering
Keywords:AlGaN, Sputtering, HEMT
Presentation information
Oral presentation
15 Crystal Engineering » 15.4 III-V-group nitride crystals
[10p-N102-1~11] 15.4 III-V-group nitride crystals
Fri. Sep 10, 2021 1:30 PM - 4:30 PM N102 (Oral)
Yusuke Hayashi(Osaka Univ.), Kenjiro Uesugi(Mie Univ.)