Estimation of the electrical characteristics of low temperature polycrystalline silicon thin film transistors through deep learning

Takayuki Kurashige; Takahiro Nagano; Akira Mizutani; Keita Katayama; Daisuke Nakamura; Tetsuya Goto; Hiroshi Ikenoue

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-N302-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Sep 10, 2021 1:30 PM - 5:45 PM N302 (Oral)

Wenchang Yeh(Shimane Univ.), Taizoh Sadoh(Kyushu Univ.)

2:15 PM - 2:30 PM

[10p-N302-4] Estimation of the electrical characteristics of low temperature polycrystalline silicon thin film transistors through deep learning

〇Takayuki Kurashige¹, Takahiro Nagano¹, Akira Mizutani², Keita Katayama¹, Daisuke Nakamura¹, Tetsuya Goto³, Hiroshi Ikenoue^1,2 (1.Grad. Sch. ISEE, Kyushu Univ., 2.Dept. of Gigaphoton Next GLP, Kyushu Univ., 3.Tohoku Univ.)

Keywords:Low-temperature poly-Si Thin-film transistor, Excimer laser annealing, Deep learning