The 82nd JSAP Autumn Meeting 2021

Wenchang Yeh

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Chairperson, etc.

Fri. Sep 10, 2021 1:30 PM - 5:45 PM N302 (Oral)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-N302-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wenchang Yeh(Shimane Univ.), Taizoh Sadoh(Kyushu Univ.)