Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Fri. Sep 10, 2021 1:30 PM - 5:45 PM N302 (Oral)
Wenchang Yeh(Shimane Univ.), Taizoh Sadoh(Kyushu Univ.)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
1:30 PM - 1:45 PM
〇Satoshi Takayama1, Sasaki Nobuo1,2, Muhammad Arif1, Uraoka Yukiharu1 (1.NAIST, 2.Sasaki Consulting)
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1:45 PM - 2:00 PM
〇Nobuo Sasaki1,2, Muhammad Arif2, Satoshi Takayama2, Yukiharu Uraoka2 (1.Sasaki Consulting, 2.NAIST)
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2:00 PM - 2:15 PM
〇Tatsuya Okada1, Takashi Noguchi1, Mitsuoki Hishida2, Kentaro Miyano2, Naohiko Kobata2, Masaki Nobuoka2 (1.Univ. Ryukyus, 2.Panasonic)
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2:15 PM - 2:30 PM
〇Takayuki Kurashige1, Takahiro Nagano1, Akira Mizutani2, Keita Katayama1, Daisuke Nakamura1, Tetsuya Goto3, Hiroshi Ikenoue1,2 (1.Grad. Sch. ISEE, Kyushu Univ., 2.Dept. of Gigaphoton Next GLP, Kyushu Univ., 3.Tohoku Univ.)
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2:30 PM - 2:45 PM
〇Takashi Nishimura1, Masahiko Tomitori2 (1.Suzuka college, 2.JAIST)
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3:00 PM - 3:15 PM
〇Ryusuke Nakamura1, Atsushi Matsumoto1 (1.Osaka Pref. Univ.)
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3:15 PM - 3:30 PM
〇Takuro Matsuo1, Keisuke Yamamoto1, Dong Wang1 (1.Kyushu Univ.)
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3:30 PM - 3:45 PM
〇Kentaro Kasahara1, Shigehisa Shibayama1, Mitsuo Sakashita1, Osamu Nakatsuka1,2 (1.Nagoya Univ., 2.IMaSS, Nagoya Univ.)
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3:45 PM - 4:00 PM
〇Hideaki Tanimura1, Hikaru Kawarazaki1, Shinichi Kato1, Ryota Wada2, Takahiro Higuchi2, Tsutomu Nagayama2, Takashi Kuroi2 (1.SCREEN Semiconductor Solutions, 2.NISSIN ION EQUIPMENT)
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4:00 PM - 4:15 PM
〇Hiroshi Furuhata1, Katsunori Makihara1, Ohta Akio1, Noriyuki Taoka1, Seiichi Miyazaki1 (1.Nagoya Univ.)
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4:30 PM - 4:45 PM
Takashi Kajiwara1, Otokichi Shimoda2, Tatsuya Okada2, Charith Jayanada Koswaththage2, Takashi Noguchi2, 〇Taizoh Sadoh1 (1.Kyushu Univ., 2.Univ. Ryukyus)
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4:45 PM - 5:00 PM
〇(M1)Shunya Nagaoka1, Manabu Ishimaru1 (1.Kyushu Inst. Tech.)
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5:00 PM - 5:15 PM
〇(M1)Kotaro Matsuguchi1, Keiya Fujimoto1, Jiawen Yu1, Hiroaki Hanafusa1, Takuma Sato1, Seiichiro Higashi1 (1.Hiroshima Univ.)
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5:15 PM - 5:30 PM
〇Takashi Hamano1,2, Keiichiro Urabe1, Koji Eriguchi1 (1.Kyoto Univ., 2.JSPS Research Fellow)
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5:30 PM - 5:45 PM
〇Ayano Furue1, Satoshi Matsumoto1, Masataka Hasegawa2 (1.KIT, 2.AIST)
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