Ryusuke Nakamura

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 5:45 PM N302 (Oral)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-N302-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:00 PM - 3:15 PM

[10p-N302-6] Explosive Crystallization of Amorphous Germanium Films by Irradiation with an Electron Beam of SEM-level Energies

〇Ryusuke Nakamura¹, Atsushi Matsumoto¹ (1.Osaka Pref. Univ.)