Nobuo Sasaki

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 5:45 PM N302 (Oral)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-N302-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:45 PM - 2:00 PM

[10p-N302-2] Growth Kinetics of the Laser Crystallized (100)-Oriented Grain-Boundary-Free Si Film

〇Nobuo Sasaki^1,2, Muhammad Arif², Satoshi Takayama², Yukiharu Uraoka² (1.Sasaki Consulting, 2.NAIST)