Hiroshi Furuhata

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 5:45 PM N302 (Oral)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-N302-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

4:00 PM - 4:15 PM

[10p-N302-10] Study on Silicidation Reaction of Fe-NDs with SiH₄

〇Hiroshi Furuhata¹, Katsunori Makihara¹, Ohta Akio¹, Noriyuki Taoka¹, Seiichi Miyazaki¹ (1.Nagoya Univ.)