Tatsuya Okada

→ Search for Tatsuya Okada in Google Scholar

Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 5:45 PM N302 (Oral)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-N302-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:00 PM - 2:15 PM

[10p-N302-3] Crystallization of a-Si Films Deposited by RF Sputtering using Blue Direct Diode Laser

〇Tatsuya Okada¹, Takashi Noguchi¹, Mitsuoki Hishida², Kentaro Miyano², Naohiko Kobata², Masaki Nobuoka² (1.Univ. Ryukyus, 2.Panasonic)