Crystallization of a-Si Films Deposited by RF Sputtering using Blue Direct Diode Laser

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Sep 10, 2021 1:30 PM - 5:45 PM N302 (Oral)

Wenchang Yeh(Shimane Univ.), Taizoh Sadoh(Kyushu Univ.)

2:00 PM - 2:15 PM

〇Tatsuya Okada¹, Takashi Noguchi¹, Mitsuoki Hishida², Kentaro Miyano², Naohiko Kobata², Masaki Nobuoka² (1.Univ. Ryukyus, 2.Panasonic)

Keywords:Blue Direct Diode Laser, Blue Laser Diode Annealing