Kotaro Matsuguchi

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 5:45 PM N302 (Oral)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-N302-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

5:00 PM - 5:15 PM

[10p-N302-13] Research on imaging technology for transient thermal diffusion processes in Si Wafers by Optical-Interference Contactless Thermometry (OICT)

〇(M1)Kotaro Matsuguchi¹, Keiya Fujimoto¹, Jiawen Yu¹, Hiroaki Hanafusa¹, Takuma Sato¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)