Taizoh Sadoh

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 5:45 PM N302 (Oral)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-N302-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

4:30 PM - 4:45 PM

[10p-N302-11] Crystallization of InSb Films on Glass by RTA

Takashi Kajiwara¹, Otokichi Shimoda², Tatsuya Okada², Charith Jayanada Koswaththage², Takashi Noguchi², 〇Taizoh Sadoh¹ (1.Kyushu Univ., 2.Univ. Ryukyus)

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