Takashi Hamano

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 5:45 PM N302 (Oral)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-N302-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

5:15 PM - 5:30 PM

△ [10p-N302-14] Electronic State Analysis of Plasma-Damaged Layers at the Sidewalls of Si Deep-RIE Holes Using Micro Photoreflectance Spectroscopy

〇Takashi Hamano^1,2, Keiichiro Urabe¹, Koji Eriguchi¹ (1.Kyoto Univ., 2.JSPS Research Fellow)