Kentaro Kasahara

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 5:45 PM N302 (Oral)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-N302-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:30 PM - 3:45 PM

[10p-N302-8] Improvement of interface uniformity and homogeneity of electrical conduction property for epitaxial HfGe₂/n-Ge(001) contact by microfabrication

〇Kentaro Kasahara¹, Shigehisa Shibayama¹, Mitsuo Sakashita¹, Osamu Nakatsuka^1,2 (1.Nagoya Univ., 2.IMaSS, Nagoya Univ.)