Satoshi Takayama

→ Search for Satoshi Takayama in Google Scholar

Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 5:45 PM N302 (Oral)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-N302-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:30 PM - 1:45 PM

[10p-N302-1] (100) oriented crystallization of Silicon thin film by CW laser annealing on amorphous substrate for fabrication of high-mobility thin-film transistor

〇Satoshi Takayama¹, Sasaki Nobuo^1,2, Muhammad Arif¹, Uraoka Yukiharu¹ (1.NAIST, 2.Sasaki Consulting)