[10p-N307-1~14] 7.1 X-ray technologies

[10p-N307-5] Development of high-groove-density laminar-type diffraction grating for Fe L-emission analysis

〇Tadashi Hatano^1,2, Masato Koike^2,3,4, Alexander S. Pirozhkov³, Tsubasa Kakio⁵, Nobukazu Hayashi⁵, Hiroyuki Sasai⁵, Tetsuya Nagano⁵, Masami Terauchi² (1.SRIS, Tohoku Univ., 2.IMRAM, Tohoku Univ., 3.QuBS, QST, 4.Eng., Osaka City Univ., 5.Device Dept., Shimadzu Corp.)

Keywords:diffraction grating, diffraction efficiency, multilayer

Laminar-type soft X-ray diffraction gratings of high-groove-density of 3200 lines/mm were coated with three period C (6.84 nm)/W (4.56 nm) and a C (3.0 nm) capping layer. Diffraction efficiency was measured in 0.5–1.2 keV and 1.1–1.6 keV regions at angles of incidence of 86° where the groove shape and multilayer structure were optimized for Fe L-emission around 705 eV, and 88° where the bottom faces of the grating do not contribute to diffraction by shadowing effect, respectively, at BL-11D, the Photon Factory. The peak diffraction efficiency was 6.8%, which compares with the reported measured diffraction efficiency of a 2400 lines/mm W/C multilayer diffraction grating, 7.1%.