Modeling of the atomic structure and EUV emission wavelength from the multiple charged ion of heavy elements

Akira Sasaki

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.1 X-ray technologies

[10p-N307-1~14] 7.1 X-ray technologies

Fri. Sep 10, 2021 1:30 PM - 5:15 PM N307 (Oral)

Mitsunori Toyoda(Tokyo Polytechnic Univ.), Tadashi Hatano(Tohoku Univ.), Akio Yoneyama(SAGA Light Source)

2:15 PM - 2:30 PM

[10p-N307-4] Modeling of the atomic structure and EUV emission wavelength from the multiple charged ion of heavy elements

〇Akira Sasaki¹ (1.KPSI, QST)

Keywords:EUV lithography, Laser plasma, Atomic processes in plasmas

Atomic structure and wavelength of EUV emission through unresolved transition array (UTA) of multiple charged heavy elements are investigated on the basis of the screened hydrogenic approach, for the improvement of the radiation-hydro simulation to optimize the tin source at 13.5 nm and blue-x sources at 6 - 7 nm for high output and efficiency.