Growth of Al2O3/ZnO/Al2O3 thin film by Atomic Layer Deposition

Presentation information

Oral presentation

15 Crystal Engineering » 15.2 II-VI and related compounds

Fri. Sep 10, 2021 1:00 PM - 1:45 PM N321 (Oral)

Kazuyuki Uno(Wakayama Univ.)

1:00 PM - 1:15 PM

〇Yuma Imai¹, Syun Kobayasi¹, Wtaru Inami¹, Atushi Nakamura¹ (1.Shizuoka Univ.)

Keywords:Atomic Layer Deposition(ALD), zinc oxide