3:30 PM - 3:45 PM
[10p-N323-10] Investigation of Low Temperature Oxidation of Si Substrates Using Chemical Solutions
Keywords:semiconductor, Si-based semiconductor
Presentation information
Oral presentation
13 Semiconductors » 13.3 Insulator technology
[10p-N323-1~12] 13.3 Insulator technology
Fri. Sep 10, 2021 1:00 PM - 4:15 PM N323 (Oral)
Keisuke Yamamoto(Kyushu Univ.), Yuuichiro Mitani(Tokyo City University)