Hiroki Takahashi

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:00 PM - 4:15 PM N323 (Oral)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[10p-N323-1~12] 13.3 Insulator technology

3:30 PM - 3:45 PM

[10p-N323-10] Investigation of Low Temperature Oxidation of Si Substrates Using Chemical Solutions

〇Hiroki Takahashi¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.TUAT)