1:45 PM - 2:00 PM
[10p-N323-4] Study of improvement of GeO2 film quality and GeO2/Ge interface state by PMA of Gold
Keywords:semiconductor, Germanium-based semiconductor
Presentation information
Oral presentation
13 Semiconductors » 13.3 Insulator technology
[10p-N323-1~12] 13.3 Insulator technology
Fri. Sep 10, 2021 1:00 PM - 4:15 PM N323 (Oral)
Keisuke Yamamoto(Kyushu Univ.), Yuuichiro Mitani(Tokyo City University)