The 82nd JSAP Autumn Meeting 2021

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[10p-N401-1~10] 7.2 Applications and technologies of electron beams

Fri. Sep 10, 2021 1:00 PM - 3:45 PM N401 (Oral)

Masayoshi Nagao(AIST), Takafumi Ishida(Nagoya University)

1:45 PM - 2:00 PM

[10p-N401-4] Evaluation of Ga Liquid Metal Electron Source by Field Emission Microscope

〇Daiki Ando1, Gai Hasimoto1, Hidenori Mimura1,2, Yoichiro Neo1,2 (1.Shizuoka Univ., 2.RIE Shizuoka Univ.)

Keywords:Electron Source, Liquid Metal