[10p-S202-1~14] 15.6 Group IV Compound Semiconductors (SiC)

[10p-S202-9] Carrier trap / recombination processes through V trap levels in 4H-SiC

〇Koichi Murata¹, Satoshi Asada¹, Hidekazu Tsuchida¹ (1.CRIEPI)

Keywords:Silicon carbide