The 82nd JSAP Autumn Meeting 2021

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Oral presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

[10p-S203-1~21] 6.3 Oxide electronics

Fri. Sep 10, 2021 1:00 PM - 6:30 PM S203 (Oral)

Akifumi Matsuda(Tokyo Tech), Shoso Shingubara(Kansai Univ.)

5:15 PM - 5:30 PM

[10p-S203-17] Controlling the reactive sputtering depositioncondition of SnO2thin filmsfor improvement the sensitivityof visible-light-transparent CO2sensors

〇Takuto Maeda1, Yuta Arai1, Mutumi Sugiyama1,2 (1.Tokyo Univ. Sci., 2.RIST)

Keywords:CO2 sensors, SnO2 thin films, reactive sputtering