The 82nd JSAP Autumn Meeting 2021

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13 Semiconductors » 13.7 Compound and power devices, process technology and characterization

[11p-N305-1~10] 13.7 Compound and power devices, process technology and characterization

Sat. Sep 11, 2021 1:30 PM - 4:15 PM N305 (Oral)

Hiroshi Yano(Univ. of Tsukuba)

2:00 PM - 2:15 PM

[11p-N305-3] Ab initio study for orientation dependence of nitrogen incorporation at 4H-SiC/SiO2 interface

〇Toru Akiyama1, Tsunashi Shimizu1, Tomonori Ito1, Hiroyuki Kageshima2, Kenji Shiraishi3 (1.MIe Univ., 2.Shimane Univ., 3.Nagoya Univ.)

Keywords:compounds, first-principles calculation