[11p-S202-1~10] 3.5 Laser system and materials

△ [11p-S202-6] Hexagonal Flattop Beam Shaping Using Phase Gratings and Spatial Frequency Filtering

〇(M1)Yuto Hirakawa¹, Yuki Kosaka², Koji Tsubakimoto¹, Hiroyuki Shiraga¹, Yoshiki Nakata¹ (1.Osaka Univ., 2.JGC Corp.)

Keywords:beam shaping, phase grating, spatial frequency filtering

Uniform fluence distribution is necessary in interference laser processing and laser annealing, skin therapy etc.. In the beam shaping method using a phase only spatial light modulator and a 4f optical system, we have succeeded in improving the shaping accuracy by optimizing the spatial frequency filtering. In this presentation, we report the results of beam shaping to hexagonal flattop beams, which are effective for large-area processing using multi-shot.