[11p-S401-1~18] 1.6 Ultrasonics

△ [11p-S401-13] Deposition and Analysis of SAW Propagation Properties of Ta₂O₅ Piezoelectric Thin Film on Pt Crystal Film

〇Keisuke Matsuura¹, Masashi Suzuki¹, Shoji Kakio¹, Masanori Kodera², Hiroshi Funakubo² (1.Univ. of Yamanashi, 2.Tokyo Institute of Technology)

Keywords:Ta2O5, Epitaxial growth, SAW

The crystal structure of Ta₂O₅ crystal thin films deposited on Pt/Si substrates using an RF magnetron sputtering system was evaluated, and high coupling due to the concentration effect of SAW particle displacement using high density Pt films was theoretically investigated.
From the polar figure, it was determined that λ-Ta₂O₅ without piezoelectricity was growing. Therefore, the piezoelectricity was reduced compared to the sample without Pt sensing. From the FEM analysis, it is considered that the SAW particle displacement was evenly distributed in Ta₂O₅ by adding the Pt interlayer and K²_eff was increased.