[11p-S401-1~18] 1.6 Ultrasonics

△ [11p-S401-15] Analysis of Longitudinal Leaky SAW on Quartz Thin Plate Bonded to Similar-material Substrate

〇Yudai Fujii¹, Takumi Fujimaki¹, Masashi Suzuki¹, Shyoji Kakio¹ (1.Univ. of Yamanashi)

Keywords:Quartz, Surface Acoustic Wave, Bonded to Similar-material Substrate

The propagation and resonance properties of longitudinal leaky surface acoustic waves (LLSAWs) on similar-material bonded structures in which an X-cut quartz (Qz) thin plate bonded to X-cut Qz with a different propagation angle were investigated theoretically. The propagation properties were found to be low attenuation and about 50 times K² and about 1/7 TCF compared to the single structure by using the X176.5°Y-Qz/X41°Y-Qz bonded structure. For resonance property, it was found that when the thicknesses of the Al-electrode film and the thin plate were optimized, LLSAW with a large admittance ratio and quality factor, which cannot be achieved by using a single Qz, can be obtained by using an X-cut Qz bonded structure.