The 82nd JSAP Autumn Meeting 2021

Presentation information

Oral presentation

16 Amorphous and Microcrystalline Materials » 16.1 Fundamental properties, evaluation, process and devices in disordered materials

[12a-N104-1~10] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

Sun. Sep 12, 2021 9:00 AM - 11:45 AM N104 (Oral)

Norimitsu Yoshida(Gifu Univ.), Toshihiro Nakaoka(Sophia Univ.)

9:15 AM - 9:30 AM

[12a-N104-2] Mechanism of Crystallization of Cat-CVD Hydrogenated n-a-Si Films on Textured Glass Substrates by FLA

Zheng WANG1, Huynh Thi Cam Tu1, Keisuke Ohdaira1 (1.JAIST)

Keywords:Thin film silicon