[12a-N104-1~10] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

[12a-N104-9] Evaluation of heat-treated selenium films by photothermal deflection spectroscopy

〇Tamihiro Gotoh¹ (1.Gunma Univ.)

Keywords:Chalcogenide semiconductor, Photothermal deflection spectroscopy, Defect states

Amorphous selenium (Se), which has excellent photoelectric properties, is used in high-sensitivity video camera tubes and X-ray image sensors. Both utilize the high electric field phenomenon, and the defect states in the bandgap play an important role. Although the details of defect states are becoming clear from the experiments and theoretical considerations conducted so far, there is a need for a method that makes it easier to obtain defect states information. Sensitive photothermal deflection spectroscopy (PDS) is suitable for evaluating defect states in Se films. In this study, we investigate the effect of heat treatment at crystallization temperature on subgap absorption and discuss the defect states of Se thin films.