The 82nd JSAP Autumn Meeting 2021

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Oral presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[12a-N203-1~10] 6.4 Thin films and New materials

Sun. Sep 12, 2021 9:00 AM - 11:30 AM N203 (Oral)

Yuji Muraoka(Okayama Univ.), Hiroshi Murotani(Tokai Univ.)

10:15 AM - 10:30 AM

[12a-N203-6] Dopant concentration dependence of surface roughness and electrical conductivity on CaF2-doped In2O3 transparent conductive film

〇(M2)Kaito Oe1, Shun Mori1, Kotaro Watanabe1, Hiroki Nagai1, Tomohiro Yamaguchi1, Takeyoshi Onuma1, Tohru Honda1, Shinya Aikawa1 (1.Kogakuin Univ.)

Keywords:Transparent conductive film, Anion doping, In2O3-based materials