[12a-N203-1~10] 6.4 Thin films and New materials

[12a-N203-5] Mobility improvement of B-doped In₂O₃ transparent conductive film
with a small amount of impurity

〇(M1)Shun Mori¹, Yukiya Ichinoseki¹, Kotaro Watanabe¹, Kaito Oe¹, Hiroki Nagai¹, Tomohiro Yamaguchi¹, Takeyoshi Onuma¹, Tohru Honda¹, Shinya Aikawa¹ (1.Kogakuin Univ.)

Keywords:transparent conductive thin films, boron, indium oxide