The 82nd JSAP Autumn Meeting 2021

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Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[12a-N301-1~11] 6.1 Ferroelectric thin films

Sun. Sep 12, 2021 9:00 AM - 12:00 PM N301 (Oral)

Hiroshi Uchida(Sophia Univ.), Noriyuki Taoka(Nagoya Univ.), Takeshi Kawae(Kanazawa Univ)

10:00 AM - 10:15 AM

[12a-N301-5] HAXPES evaluation of the chemical bond state of the elements in the polarization-inverted AlScN film

〇Ryota Tsujiguchi1, Yoshiharu Kirihara1, Kuniyuki Kakushima2, Akira Yasui3, Hiroshi Nohira1 (1.Tokyo City Univ., 2.Tokyo Institute of Technology, 3.JASRI)

Keywords:AlScN Ferroelectric HAXPES