Temperature Compensation in Minimal Laser Heating Furnace

kazushige sato; Takashi Chiba; Masao Terada; Kengo Hamada; Sommawan Sommawan; Shiro Hara

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[12a-N323-1~8] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sun. Sep 12, 2021 9:45 AM - 12:00 PM N323 (Oral)

Daisuke Yamane(Ritsumeikan Univ.), Shiro Hara(National Institute of Advanced Industrial Science and Technology)

11:45 AM - 12:00 PM

[12a-N323-8] Temperature Compensation in Minimal Laser Heating Furnace

〇kazushige sato^1,3, Takashi Chiba^1,3, Masao Terada^1,3, Kengo Hamada^1,3, Sommawan Sommawan^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST, 3.Sakaguchi E.H VOC Corp.)

Keywords:Minimal Fab, Laser Heating

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