[12a-S301-1~11] 6.2 Carbon-based thin films

[12a-S301-9] Development of a scanning diamond NV-center probe fabricated by FIB

〇(DC)Yuta Kainuma¹, Kunitaka Hayashi¹, Chiyaka Tachioka¹, Aoi Ideguchi¹, Toshu An¹ (1.JAIST)

Keywords:NV center, magnetic imaging, scanning probe microscopy

NV(nitrogen-vacancy) center in diamond, a fluorescent defect dependent on an external magnetic field, has been attracting attention for an application as magnetometry. A scanning diamond probe hosting NV centers at the apex has realized magnetic sensing at nanoscale resolution. We fabricated a scanning NV center probe with FIB milling free from the lithography fabrication. The scanning NV center probe can image the magnetic stray field from the magnetic tape recorded an audio signal. However, ODMR spectra measured from the scanning NV center probe fabricated by FIB show the asymmetric electron resonance spectra, which is due to broader NVs depth distribution using typeⅡa diamond. We are successful to generate NV centers near the surface of electric grade diamond substrate, to improve spatial resolution and magnetic sensitivity. We report improvement of the performance of a scanning NV center probe using electric grade diamond.