[12p-N102-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12p-N102-6] Development of LiAlGePO electrolyte-solid film by plasma sputtering for all-solid-state lithium-ion batteries

〇Junki Hayashi¹, Kenta Nagai¹, Yuma Habu¹, Misao Kiga¹, Teruya Yamada¹, Giichiro Uchida^1,2 (1.Meijo Univ., 2.Ene. Inst. Meijo Univ.)

Keywords:sputtering, solid electrolyte, Li-ion battery