The 82nd JSAP Autumn Meeting 2021

Hiroki Kondo

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Chairperson, etc.

Sun. Sep 12, 2021 1:30 PM - 5:30 PM N102 (Oral)

  • Oral presentation
  • | 8 Plasma Electronics
  • | 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12p-N102-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Kosuke Takenaka(Osaka Univ.), Hiroki Kondo(Nagoya Univ.)

Sat. Sep 11, 2021 9:00 AM - 11:40 AM S301 (Oral)

  • Symposium (Oral)
  • | Symposium
  • | Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

[11a-S301-1~7] Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

Takeshi Momose(Univ. of Tokyo), Hiroki Kondo(Nagoya Univ.)