Mist CVD Growth of Rocksalt-Structured MgZnO Films Emitting at 195 nm

Kotaro Ogawa; Wataru Kosaka; Kanta Kudo; Izumi Serizawa; Kentaro Kaneko; Tomohiro Yamaguchi; Shizuo Fujita; Tohru Honda; Takeyoshi Onuma

Presentation information

Oral presentation

21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[12p-N206-1~19] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Sun. Sep 12, 2021 1:00 PM - 6:15 PM N206 (Oral)

Mutsumi Sugiyama(Tokyo Univ. of Sci.), Katayama Tsukasa(Hokkaido Univ), Riena Jinno(Univ of Tokyo)

5:15 PM - 5:30 PM

△ [12p-N206-16] Mist CVD Growth of Rocksalt-Structured MgZnO Films Emitting at 195 nm

〇Kotaro Ogawa^1,2, Wataru Kosaka², Kanta Kudo², Izumi Serizawa¹, Kentaro Kaneko³, Tomohiro Yamaguchi², Shizuo Fujita³, Tohru Honda², Takeyoshi Onuma² (1.ORC Manufacturing Co. Ltd., 2.Kogakuin Univ., 3.Kyoto Univ.)

Keywords:MgZnO, Mist CVD, VUV

Rocksalt-structured (RS) MgZnO alloys have been expected as the new luminescent material for VUV emitter owing to have ultrawide bandgap energy. In this presentation, we will report recent results of RS-Mg_xZn_1-xO(x>0.9) growth on MgO(100) substrate by mist CVD method.