The 82nd JSAP Autumn Meeting 2021

Presentation information

Oral presentation

21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[12p-N206-1~19] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Sun. Sep 12, 2021 1:00 PM - 6:15 PM N206 (Oral)

Mutsumi Sugiyama(Tokyo Univ. of Sci.), Katayama Tsukasa(Hokkaido Univ), Riena Jinno(Univ of Tokyo)

1:15 PM - 1:30 PM

[12p-N206-2] Effect of UV-irradiation Time on the Transfer Characteristics of All Solution-processed a-IZO Thin-Film Transistor

〇(D)Umu Hanifah1, Juan Paolo Bermundo1, Dianne Corsino1, Mutsunori Uenuma1, Yukiharu Uraoka1 (1.Nara Institute of Science and Technology)

Keywords:solution-processed, thin-film transistor, UV-irradiation

Next-generation devices need a simple fabrication process and low-temperature fabrication. From these criteria, the solution-process approach is a promising method. A few studies focus on a-IZO TFT electrical performance improvement have been reported, but using a quick and simple way by varying UV-irradiation time still needs further investigation. This research aims to study the effect of UV-irradiation time on the transfer curve of a-IZO TFT.
Top-gate self-aligned structure a-IZO TFT was fabricated using all-solution process. Then UV-irradiation was performed at 115°C for 60, 90, and 120 min. After UV treatment, the exposed IZO layer transforms as gate, source, and drain, respectively. The UV-irradiation time combine with low-temperature heat enhance the transfer characteristics. This work has demonstrated that varying UV-irradiation time is a simple and promising method to improve a-IZO TFT performance at low-temperature process, which is useful for flexible substrate application.