The 82nd JSAP Autumn Meeting 2021

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Oral presentation

13 Semiconductors » 13.7 Compound and power devices, process technology and characterization

[12p-N305-1~14] 13.7 Compound and power devices, process technology and characterization

Sun. Sep 12, 2021 1:30 PM - 5:15 PM N305 (Oral)

Kenji Shiojima(Univ. of Fukui), Kozo Makiyama(Sumitomo Electric Industries, Ltd.)

3:45 PM - 4:00 PM

[12p-N305-9] Diamond Field-Effect Transistors with Modulation Doping

〇Makoto Kasu1, Niloy Chandra Saha1, Seong-Woo Kim2, Toshiyuki Oishi1 (1.Saga Univ., 2.Adamant Namiki Precision Jewel Co., Ltd.)

Keywords:semiconductor, diamond, FET

Diamond Field-Effect Transistors with Modulation Doping is proposed and demonstrated.