The 82nd JSAP Autumn Meeting 2021

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13 Semiconductors » 13.7 Compound and power devices, process technology and characterization

[12p-N305-1~14] 13.7 Compound and power devices, process technology and characterization

Sun. Sep 12, 2021 1:30 PM - 5:15 PM N305 (Oral)

Kenji Shiojima(Univ. of Fukui), Kozo Makiyama(Sumitomo Electric Industries, Ltd.)

3:15 PM - 3:30 PM

[12p-N305-8] Correlation between film stress and EL color in GaN HEMTs on SiC substrate

〇Shiyo Urano1, Qiang Ma1, Yuji Ando2, Atsushi Tanaka2, Akio Wakejima1 (1.Nagoya Inst., 2.Nagoya Univ.)

Keywords:GaN, HEMT, Electro Luminescence