2021年第82回応用物理学会秋季学術講演会

講演情報

一般セッション(口頭講演)

4 JSAP-OSA Joint Symposia 2021 » 4.6 Terahertz Photonics

[12p-N405-1~11] 4.6 Terahertz Photonics

2021年9月12日(日) 13:00 〜 16:00 N405 (口頭)

瀧田 佑馬(理研)、村手 宏輔(名大)

13:00 〜 13:15

[12p-N405-1] Terahertz radiation mechanism from a metal-insulator-semiconductor structure upon femtosecond laser illumination

〇(D)Dongxun Yang1、Masayoshi Tonouchi1 (1.Osaka Univ.)

キーワード:Metal-insulator-semiconductor, Terahertz emission spectrum

Local characterization of insulator/semiconductor interface is quite meaningful but challenging. It can provide huge local information including passivation, defects, and transient carrier dynamics of the semiconductor devices, such as the metal-insulator-semiconductor (MIS) structure. As the most promising method, the laser-excited Terahertz (THz) emission spectrum (LTEM) has great potential in achieving such goal due to its nondestructive and noncontact manner. However, the mechanism of the THz emission from the insulator/semiconductor interface is complex and hard to understand, which limits its application. Therefore, it is necessary to provide a simplified formula for describing the mechanism of THz radiation. In this study, we formulated the mechanism of THz radiation based on a Si metal-oxide-semiconductor (MOS) structure to semi-quantitatively evaluate the MOS devices.